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Particle Measuring Systems (PMS) has announced the Chem 20 SM, a 20 nm liquid particle counter designed for inline monitoring of hazardous-area solvents used in semiconductor manufacturing. PMS positions the instrument as a self-contained alternative to installing a conventional counter inside a customer-built, nitrogen-purged enclosure.
What the Chem 20 SM is
The Chem 20 SM is the hazardous-area variant of PMS’s Chem 20 chemical particle-counter line. It is intended to detect particles as small as 20 nanometers in high-purity process chemicals, with continuous measurement close to the point of use. PMS specifically names isopropyl alcohol (IPA), propylene glycol monomethyl ether acetate (PGMEA) and other lithography solvents as target applications.
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The announcement is aimed at semiconductor manufacturers and chemical suppliers that need to identify contamination before it reaches wafer-processing steps. The broader Chem 20 family supports online and batch sample-based monitoring; the SM model is the version PMS describes for hazardous-area solvent service.
Why hazardous-area solvent monitoring is difficult
Solvents used in semiconductor facilities can create hazardous-area installation constraints. A standard liquid particle counter may therefore be placed inside a custom enclosure supplied with nitrogen purge and associated controls. That approach can consume space, add engineering work and create additional maintenance and validation tasks.
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PMS says Chem 20 SM integrates the required protection into a compact instrument, removing the need for a separate customer-built containment enclosure. In practical terms, the claimed benefit is a simpler installation with the measurement point kept inline and near the process. The enclosure and maintenance savings are PMS product claims, not independently published comparative results.
Key specifications and capabilities
| Item | What is stated |
|---|---|
| Minimum particle size | 20 nm, according to PMS’s 2026 launch announcement and Chem 20 product information |
| Measurement mode | Inline, continuous monitoring; the wider Chem 20 line also supports batch sampling |
| Target liquids | IPA, PGMEA and other high-purity or lithography solvents |
| Operating model | Designed for continuous 24/7 operation, with local and remote data access |
| Hazardous-area frameworks named by PMS | IECEx, ATEX and NFPA 70 NEC Class I, Division 2 |
| Public price | Not stated |
| Public certificate numbers or test reports | Not stated in the launch announcement |
A 20 nm rating identifies the stated detection threshold; it does not by itself establish performance for every solvent, refractive index, flow condition or contamination type. A facility should request application-specific compatibility and validation information before specifying the instrument.
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What the certification statement means
PMS says Chem 20 SM will meet IECEx, ATEX and NFPA 70 NEC Class I Division 2 requirements. The announcement does not publish certificate IDs, protection concepts, gas-group or temperature-class ratings, permitted installation zones, wiring rules, or test reports. Those details determine whether an instrument is acceptable at a particular site.
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How Chem 20 SM would fit into a monitoring system
- Define the sampling point. Identify the solvent line, flow range, pressure, temperature and required response time. Confirm whether the process needs true inline measurement or an isolated batch sample.
- Confirm chemical compatibility. Ask PMS to verify IPA, PGMEA and any additional solvents, including refractive-index limits, wetted materials and cleaning requirements.
- Verify the hazardous location. Match the site classification and electrical design to the instrument’s final IECEx, ATEX or NEC documentation rather than relying only on the product announcement.
- Plan data and alarms. PMS describes local and remote access; define alarm thresholds, historian or manufacturing-execution-system connections, user access and required audit records.
- Validate performance. Establish baseline particle levels, challenge or verification procedures, calibration intervals and acceptance criteria with the quality organization before production release.
For operations that also need discrete sample testing, PMS lists the SLS-20 syringe liquid batch sampler as an accessory for the wider Chem 20 platform. Batch sampling can complement, but does not replace, an inline alarm strategy when contamination must be detected continuously.
How it compares with a conventional enclosed counter
| Decision factor | Chem 20 SM approach | Conventional counter in a nitrogen-purged enclosure |
|---|---|---|
| Hazardous-area strategy | Self-contained instrument designed for the stated hazardous-area frameworks | Protection depends on the custom enclosure, purge system and facility design |
| Sampling | Inline continuous monitoring | May be inline, but enclosure and sampling design are project-specific |
| Facility engineering | PMS claims reduced enclosure complexity and space requirements | Requires enclosure engineering, purge controls and associated maintenance |
| Data access | PMS describes local and remote access | Depends on the selected counter and integration design |
| Independent head-to-head data | Not published | Not established for a specific competing configuration |
| Total cost | Public price not stated; request a site-specific quote | Includes counter, enclosure, purge and engineering costs |
The table describes the design trade-off, not a performance ranking. Particle-size sensitivity, solvent compatibility, certification scope, service support and validation evidence should be compared using equivalent test conditions.
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Availability, pricing and purchasing
PMS presents Chem 20 SM as a specialized business-to-business instrument sold through a contact or request-a-quote process. No public price was identified, and there is no verified consumer retail or Amazon listing. An authorized distributor listing gives a normal shipping estimate of two to three weeks, but delivery depends on configuration, order acceptance and region; it should not be treated as a guaranteed lead time.
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Questions to resolve before specifying it
- Which certificate numbers and protection ratings apply to the exact Chem 20 SM configuration?
- Is the intended installation covered by IECEx, ATEX, NEC Class I Division 2, or more than one framework?
- What particle-size, concentration and flow specifications are guaranteed in IPA, PGMEA and other solvents?
- What calibration, cleaning, maintenance and solvent-change procedures are required?
- Which protocols and interfaces are available for remote data, alarms and manufacturing-system integration?
- What are the delivered price, support terms and confirmed lead time for the installation region?
The Bottom Line
Chem 20 SM is presented by Particle Measuring Systems as a 20 nm, continuously operating solvent particle counter for hazardous semiconductor-process areas. Its main proposed advantage is eliminating a separate nitrogen-purged enclosure, but buyers still need configuration-specific certification, compatibility and validation documents before treating it as approved for a particular installation.
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